Improved beam profile of a 266 nm
deep ultraviolet laser employing
a multi-mirror-reflected cavity
Houwen Yang1,2, Wenyong Cheng1, Junhua Wang1,3, Yaguang Zhang1,2,
Xiaoqian Wang1,3 and Lijie Zhang1,3
1 Advanced Research Centre for Optics, Shandong University, Ji’nan, Shandong 250100,
People’s Republic of China
2 Key State Laboratory of Crystal Materials, Shandong University, Ji’nan, Shandong 250100,
People’s Republic of China
3 School of Information Science and Engineering, Shandong University, Ji’nan, Shandong 250100,
People’s Republic of China
E-mail: cwy@sdu.edu.cn
Received 8 January 2016, revised 13 February 2016
Accepted for publication 16 February 2016
Published 15 March 2016
Abstract
A 266 nm deep ultraviolet (DUV) laser with a good Gaussian profile is reported employing
a multi-mirror-reflected cavity. A type-I LiB3O5 (LBO) crystal is used to double the
fundamental-light (1064 nm) wavelength generated by an actively Q-switched Nd:YVO4
laser with an intra-cavity configuration. A fourth harmonic generation (FHG) wavelength is
obtained by a type-I β-BaB2O4 (BBO) crystal. The output power as high as 440 mW at 266 nm
is generated under an incident power of 2.26 W at 532 nm, corresponding to the conversion
efficiency of 532 nm–266 nm up to 19.5% with a repetition rate of 15 kHz and the pulse
duration of 266 nm is 10.7 ns.
Keywords: deep ultraviolet laser, diode-pumped, harmonic generation, multi-mirror-reflected cavity
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